15 Pieces/Pack 10μm Micro Capacitor Interdigitated Electrodes IDE Silicon Substrate High-Accuracy MEMS Biosensor Medical Chemical Optical Sensor Chip

This high-accuracy 10μm silicon substrate micro capacitor is widely used in optical, biological and medical sensors, with reliable performance and stable quality! 1. The substrate: P-type monocrystalline silicon with 300nm thickness of SiO2 on the surface of the silicon wafer. The size of the substrate is 4mm ╳ 7mm ╳ 0.52mm. 2. The conductor layer structure: Cr/Au, the thickness are 30nm and 100nm respectively. 3. Line Space: 10μm; Line Width: 50μm; Width Length: 2000μm. 4. The suitable temperature for using is from - 100 degrees Celsius to +400 degrees Celsius.5. This product can be used as core part of biological, medical, chemical and optical sensors. We offer all kinds of interdigitated electrodes, various sizes, various shapes, various substrate, various line spaces and various proceeds (Electroplating, MEMS, Thick film, Printing). Beside of the listing products, We can customize interdigitated electrodes according your needs. Please do not hesitate to contact us, if you have any requirments or questions.